日本理音RION KS-41B液體粒子計(jì)數(shù)器
簡(jiǎn)要描述：日本理音RION KS-41B液體粒子計(jì)數(shù)器Measures 0.1µm Particles in Photoresist, SOG and other solutions 0.07µm as Option（For measuring clear solutions such as UPW）
產(chǎn)品型號(hào)： KS-41B
所屬分類(lèi)：塵埃粒子計(jì)數(shù)器
更新時(shí)間：2024-08-14
詳細(xì)說(shuō)明：
| 日本理音RION KS-41B液體粒子計(jì)數(shù)器 產(chǎn)地：日本 |
Measures 0.1µm Particles in Photoresist, SOG and other solutions
0.07µm as Option(For measuring clear solutions such as UPW)
< Specification > | Optical system | Light-scattering method | | Light source | Diode pumped solid state laser (wavelength 532 nm, rated output 500 mW) | | Materials of parts exposed to sample | Synthetic quartz, PFA | | Size range | 1 to 10 channels (Setting range 0.1µm to 0.5µm) | | Sample flow rate | 5 mL/min | | Counting efficiency | 50±10 % | | Maximum particle number concentration | 48 000 particles/mL (at 10 % coincidence loss for 0.1µm particles) | | Power | DC12 V (supplied by KE-40B1) | | Dimensions and weight | 164 (H) x 464 (W) x 320 (D) mm (excluding protruding parts), Approx. 12.5 kg |
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